A

Senior/ Lead Research Engineer (FAB), Implant / RTA Process, IME

A*STAR

Singapore, Singapore, Singapore Full-Time June 09, 2026
Apply Now

Opportunity Description

Implant / RTA Process Engineer ? R&D


The Implant / RTA Process Engineer is responsible for sustaining daily operations, ensuring stable tool performance, and maintaining high process reliability for ion implantation, rapid thermal annealing (RTA), and related thermal processes. This role emphasizes equipment health monitoring, preventive maintenance leadership, recipe integrity, process recovery, and rapid issue resolution. Familiarity with Epitaxy (Epi) processes is advantageous for broader device and material stack considerations. AI- and data-driven techniques are used to predict drifts, shorten downtime, and enhance process robustness.


Key Responsibilities:


Data Analytics & Process Control

  • Monitor and maintain Implant/RTA performance using SPC, structured analytics, and data-driven fault detection methods.

  • Develop statistical models or machine learning workflows to predict drift, equipment degradation, or anomalous...
  • Full-Time Engineers

    Ready to Apply?

    Submit your application for Senior/ Lead Research Engineer (FAB), Implant / RTA Process, IME at A*STAR

    Apply for this Position